Yttria-stabilized zirconia (YSZ) is a ceramic material whose special manufacturing process is to change the phase transition temperature range of zirconium dioxide by adding yttria, thereby producing stable cubic and tetragonal crystals at room temperature. In addition, since pure zirconium oxide needs to be doped with yttrium to stabilize its structure, yttria-doped zirconium oxide single crystals (YSZ) are usually used in actual use, that is, zirconium oxide single crystals with yttrium stabilizers added. YSZ crystal substrates are widely used in various fields due to their excellent performance, such as fuel cells, oxygen sensors, high-temperature superconductors, etc.